张鑫,海阔,李资政,张瀛怀,张斌智,张云飞,臧仲明,曾鹏,吴明涛,李凯隆,闫力松,陈太喜,钱宜刚,焦宏飞.先进光学超精密制造技术现状、问题与建议[J].中国科学院院刊,2025,40(5):870-878.

先进光学超精密制造技术现状、问题与建议

Present situation, problems and suggestions of advanced optical ultra-precision manufacturing technology

张鑫¹
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
ZHANG Xin¹
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
海阔^2*
中国工程物理研究院机械制造工艺研究所 成都 610200
HAI Kuo^2*
Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
李资政³
中山大学 物理与天文学院 珠海 519082
LI Zizheng³
School of Physics and Astronomy, Sun Yat-sen University, Zhuhai 519082, China
张瀛怀¹
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
ZHANG Yinghuai¹
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
张斌智¹
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
ZHANG Binzhi¹
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
张云飞²
中国工程物理研究院机械制造工艺研究所 成都 610200
ZHANG Yunfei²
Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
臧仲明²
中国工程物理研究院机械制造工艺研究所 成都 610200
ZANG Zhongming²
Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
曾鹏²
中国工程物理研究院机械制造工艺研究所 成都 610200
ZENG Peng²
Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
吴明涛²
中国工程物理研究院机械制造工艺研究所 成都 610200
WU Mingtao²
Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
李凯隆²
中国工程物理研究院机械制造工艺研究所 成都 610200
LI Kailong²
Institute of Mechanical Manufacturing Technology, China Academy of Engineering Physics, Chengdu 610200, China
闫力松⁴
华中科技大学 光学与电子信息学院 武汉 430074
YAN Lisong⁴
School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
陈太喜¹
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
CEHN Taixi¹
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
钱宜刚⁵
中天科技有限公司 南通 226009
QIAN Yigang⁵
Zhongtian Technology Co. Ltd., Nantong 226009, China
焦宏飞⁶
同济大学 物理科学与工程学院 上海 200092
JIAO Hongfei⁶
School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

         光学元件;超精密制造;复杂曲面;全频段

        optical elements;ultra-precision manufacturing;complex surface;full frequency band

        随着激光核聚变、空间对地观测、深空探测、极紫外光刻等关键领域的不断发展，对高面形精度、高表面质量光学元件需求的不断增加，先进光学超精密制造技术已成为国家高端制造领域的核心支柱。文章围绕光学元件的材料制备技术、超精密成形、抛光、检测及表面处理技术等方面，阐述了国内先进光学超精密制造技术的研究现状，分析了国内该领域存在的问题及应对措施，对先进光学超精密制造技术的下一个新阶段进行了展望，希望能引发该领域研究的一些思考。

        With the continuous development of key fields such as laser nuclear fusion, space-to-earth observation, deep space exploration, and extreme ultraviolet lithography, the demand for optical components with high surface shape accuracy and high surface quality is increasing. Advanced optical ultra-precision manufacturing technology has become the core pillar of the national high-end manufacturing field. In this paper, the research status of advanced optical ultra-precision manufacturing technology in China is described with the focus on material preparation technology of optical components, ultra-precision forming, polishing, testing and surface treatment technology of components. The existing problems and countermeasures in this field in China are analyzed. Finally, the new stage of advanced optical ultra-precision manufacturing technology is prospected, hoping to lead to some thinking in this field.