谭军,刘峰,罗明生.超精密装备中的材料科学和技术[J].中国科学院院刊,2025,40(5):861-869.

超精密装备中的材料科学和技术

Materials science and technology in ultra-precision equipment

谭军
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
TAN Jun
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
刘峰
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
LIU Feng
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China
罗明生
季华实验室(先进制造科学与技术广东省实验室) 佛山 528200
LUO Mingsheng
Ji Hua Laboratory (Guangdong Provincial Laboratory of Advanced Manufacturing Science and Technology), Foshan 528200, China

         超精密装备;材料科学与技术;挑战与机遇

        ultra-precision equipment;materials science and technology;challenges and opportunities

        超精密装备的技术进步高度依赖高性能材料的发展，关键材料的制备和加工工艺直接影响超精密装备的综合性能水平及其使役行为，而高性能材料短板已成为我国高端装备制造的一个主要薄弱环节。文章系统总结了超精密装备中主要材料的应用情况，对超精密装备中高性能材料制备与加工技术的发展现状进行了综述，并对相关领域未来的发展方向提出展望。文章在深入分析当前我国超精密装备材料领域面临的主要问题基础上，结合实际情况分别从技术层面和政策层面提出了解决办法和发展思路，以期助力实现各类先进材料与制造科技的深度融合，进而推进超精密装备制造技术的优化升级和提高相关产业竞争力。

        The technological advancement of ultra-precision equipment is highly dependent on the development of advanced highperformance materials. The preparation and processing techniques of key materials directly impact the performance and service behavior of ultra-precision equipment. Nevertheless, the shortcomings in high-performance materials have become major weaknesses in China’s high-end equipment manufacturing. This study systematically summarizes the application of advanced materials in ultraprecision equipment and provides an in-depth analysis of the current status of material preparation and processing technologies, and prospects for future development directions in this field are offered as well. Based on a thorough analysis of the main issues currently faced by China’s ultra-precision equipment material industry, the study proposes solutions and development strategies from both technical and policy perspectives, aiming to facilitate the deep integration of various advanced materials and manufacturing technologies, thereby promoting the optimization and upgrading of ultra-precision equipment manufacturing technology and enhancing the competitiveness of related industries.