面向“十五五”的超精密装备：挑战与机遇

Ultra-precision equipment for 15th Five-Year Plan: Challenges and opportunities

        曹健林(季华实验室(先进制造科学与技术广东省实验室) 佛山 528200)

         超精密装备;制造业;4类企业;3支队伍

        ultra-precision equipment;manufacturing industry;four types of enterprises;three teams

        精密装备通常指加工工艺中精度达到微米级的装备，超精密装备通常需要达到微米级甚至纳米级以上。超精密装备是今天先进制造的基础，同时也是若干高技术产业的关键组成部分，如集成电路、显示、航空航天、仪器仪表、高端机床等。这些产业中超精密装备的水平对该产业的发展水平有决定性影响。超精密装备还是现代科学、技术和工程实践成果的结晶，其发展是一个不断迭代进步的历史过程，需求牵引、科技进步和工程师的关键技能（know-how）积累缺一不可。时至今日，超精密装备产业基本被发达国家的少数企业垄断。超精密装备产业比较薄弱，也是中国作为全球第一制造业大国但还不是制造强国的重要原因之一。文章分析了当前我国超精密装备产业发展的现状和存在的主要问题，以及这些问题产生的原因。面对剧烈变化的内外环境，提出了抓住机遇、迎接挑战的具体工作建议。

        People generally refer to equipment with micron-level precision in manufacturing processes as precision equipment, while equipment meeting requirements beyond the micron level (nanometer-level) is termed ultra-precision equipment. Ultra-precision equipment serves as the foundation of advanced manufacturing today and is also a critical component of several high-tech industries, such as integrated circuits, displays, aerospace, instrumentation, and high-end machine tools. The level of ultra-precision equipment in these industries has a decisive impact on their development. Ultra-precision equipment is also the crystallization of modern scientific, technological, and engineering practices, and its development is a historically iterative process, requiring the interplay of demanddriven factors, technological advancements, and the accumulation of engineers’ know-how. To this day, the ultra-precision equipment industry remains largely monopolized by a few enterprises in developed countries. The relative weakness of the ultra-precision equipment industry is one of the key reasons why China, the world’s largest manufacturing nation, has not become a manufacturing powerhouse yet. This study analyzes the current state of China’s ultra-precision equipment industry, identifies major challenges, and examines the root causes of these issues. In the face of rapidly changing internal and external environments, it proposes specific recommendations to seize opportunities and address challenges.