硅基光电异质集成的发展与思考
Development and Thinking of Silicon Photonics Heterogenous Integration
Development and Thinking of Silicon Photonics Heterogenous Integration
作者
王子昊1,2(中国科学院物理研究所 北京 100190;松山湖材料实验室 东莞 523808)
王霆1,2(中国科学院物理研究所 北京 100190;松山湖材料实验室 东莞 523808)
张建军1,2*(中国科学院物理研究所 北京 100190;松山湖材料实验室 东莞 523808)
王霆1,2(中国科学院物理研究所 北京 100190;松山湖材料实验室 东莞 523808)
张建军1,2*(中国科学院物理研究所 北京 100190;松山湖材料实验室 东莞 523808)
中文关键词
光电集成;硅基光电子;异质集成
英文关键词
photonic integration;silicon photonics;heterogenous integration
中文摘要
光电子器件与传统微电子硅基互补金属氧化物半导体（CMOS）芯片的集成是未来信息技术的重要发展方向。现有硅基光电子集成技术得益于CMOS技术高集成度、低成本的优势，但主要采用硅材料制成，受限于硅材料本身的光电性质。硅基光电异质集成技术在利用CMOS晶圆制造优势的同时可兼容更多性能优异的光电异质材料，是未来光电集成技术的主要发展方向。文章介绍了该方向世界范围内的飞速发展形势及我国在该领域的研究基础，探讨了该领域未来的发展趋势和蕴藏的重要创新机遇。
英文摘要
Integrated photonics are fast-developing research field for next generation information technology. Current silicon photonic integrated chips strongly benefit from low-cost and high-density integration properties of existing CMOS technology. But limited by the physical properties of silicon, it is not a perfect material for different types of optoelectronic devices, such as laser sources, modulators, and infrared detectors. Therefore, heterogeneous integration is proposed by combining the advantages of CMOS process and superior opto-electric properties of heterogenous material systems, that can be an essential step towards next generation integrated optoelectronic chips. Here, this paper introduces the rapid progress of integrated photonics nationally and worldwide, while discusses the potential directions and opportunities in this field.
DOI10.16418/j.issn.1000-3045.20211208005
作者简介
王子昊 中国科学院物理研究所副研究员,松山湖材料实验室兼职副研究员。主要研究领域:量子点激光器、硅基光电异质集成等。主持和参与中国科学院、科学技术部、国家自然科学基金委员会等单位的 5项重大课题。
E-mail:wangzihao@iphy.ac.cn
WANG Zihao Associate Professor of Institute of Physics, Chinese Academy of Sciences (CAS) and Songshan Lake Materials Laboratory. His research focuses on quantum dots lasers and Si photonics heterogenous integration. In recent years, he has mainly undertaken and participated 5 projects sponsored by the CAS, Ministry of Science and Technology, National Natural Science Foundation of China, and so on.
E-mail:wangzihao@iphy.ac.cn
张建军 中国科学院物理研究所研究员,松山湖材料实验室兼职研究员。主要研究领域:硅基光电异质集成、量子计算、原子制造等。近年主持中国科学院、科学技术部、国家自然科学基金委员会等单位的10余项重大课题。
E-mail:jjzhang@iphy.ac.cn
ZHANG Jianjun Ph.D. in Physics, Professor of Institute of Physics, Chinese Academy of Sciences (CAS) and Songshan Lake Materials Laboratory. His research focuses on Si photonics heterogenous integration, quantum computing, atomic fabrication, etc. In recent years, he has mainly undertaken more than 10 major projects sponsored by the CAS, Ministry of Science and Technology, National Natural Science Foundation of China, and so on.
E-mail:jjzhang@iphy.ac.cn
E-mail:wangzihao@iphy.ac.cn
WANG Zihao Associate Professor of Institute of Physics, Chinese Academy of Sciences (CAS) and Songshan Lake Materials Laboratory. His research focuses on quantum dots lasers and Si photonics heterogenous integration. In recent years, he has mainly undertaken and participated 5 projects sponsored by the CAS, Ministry of Science and Technology, National Natural Science Foundation of China, and so on.
E-mail:wangzihao@iphy.ac.cn
张建军 中国科学院物理研究所研究员,松山湖材料实验室兼职研究员。主要研究领域:硅基光电异质集成、量子计算、原子制造等。近年主持中国科学院、科学技术部、国家自然科学基金委员会等单位的10余项重大课题。
E-mail:jjzhang@iphy.ac.cn
ZHANG Jianjun Ph.D. in Physics, Professor of Institute of Physics, Chinese Academy of Sciences (CAS) and Songshan Lake Materials Laboratory. His research focuses on Si photonics heterogenous integration, quantum computing, atomic fabrication, etc. In recent years, he has mainly undertaken more than 10 major projects sponsored by the CAS, Ministry of Science and Technology, National Natural Science Foundation of China, and so on.
E-mail:jjzhang@iphy.ac.cn
